Starting From 45.000$ for 200 mm ODStarting From 55.000$ for 300 mm OD |
OPT-RTP 1000 RTP Tube Furnace
OPT-RTP1000 Rapid Thermal Processing Tube Furnace a splitable furnace with 3 hot zones and with halogen heating element for fast heating with plasma generetor
Technical Parameters
- Furnace Part
| Display | LCD Touch Screen |
| Chamber | Split chamber |
| Display | 7″ Windows based LCD Touch Screen |
| Continuous Working Temp. | ≤900℃ |
| Heating Rate | ≤80℃/S |
| Hot Zone | 300+300+300 mm 3 Zones can be set independently. |
| Tube Size | 250*2500mm approx. OD*L
Actual length depends on final design |
| Tube material | High purity quartz |
| Chamber Material | Alumina fiber |
|
Vacuum Flange |
Stainless steel vacuum flange, one side is with needle valve and mechanical pressure meter, the other side is with KF port |
| Heating Element | Halogen lamp x 3 pcs
|
| Holder | Stainless Steel Holder
Suitable for 3pcs solar cell samples (210*210mm) |
| Thermocouple | K type x 3pcs |
| Temperature Control | PID automatic control via SCR power control |
| Heating curves | 30 steps programmable |
| Power | 380V, 50 Hz, three phases Actually power depends on our final design. |
2. Plasma Unit
| Plasma RF Power Supply | Output Power: | 5 -500W adjustable with ± 1% stability. |
| RF frequency: | 13.56 MHz ±0.005% stability. | |
| Reflection Power: | 200W max. | |
| Matching: | Automatic under 3 sec | |
| RF Output Port: | 50 Ω, N-type, female | |
| Noise: | <50 dB. | |
| Cooling: | Air cooling. | |
| Power: | 208-240VAC, Single Phase, 50/60Hz | |
| Coil : | Suitable to use with 250 mm OD Tubes | |
| Power protection | Over current protection, Over temperature
protection, reflect power protection |
|
| Control model | PLC/RS232\485
Internally piloting/PLC analog quantity/RS232/485 communication |
3.Vacuum Pump and Water Chiller
| Diffusion Pump System | Rotary vane vacuum pump + diffusion pump+composite digital vacuum gauge
Support furnace tube inside to reach 10-2 torr vacuum level |
| Water Chiller | Used for above diffusion pump system |
4. Mobile Inverted Microscope
Mobile microscope with 4X, 10X and 40X Objectives
Can be integrated to any smartphone
Inverted type (Illuminated from the top side)
