Product Performance
The power supply integrates the RF power supply and the automatic matching device through a special RF isolation design to reduce the volume of the RF system. Output power 300W, frequency 13.56MHz, standard sine wave. Large screen LCD display: set power, incident power, reflected power, status and other parameters.
Application
The power supply can be used as the power supply for RF driven plasma systems. Applications include: magnetron sputtering, plasma cleaning, PECVD and other small capacitive RF systems.
| Product Specifications | 300W |
| Output Power | 0-300W |
| Job stability | ≤±0.5% |
| Output frequency | 13.56MHz |
| Withstand standing wave ratio | ＞3.0 |
| Frequency signal | Standard sine wave |
| Input voltage | AC180-250V |
| Input Current | 3A |
| Output Impedance | 50Ω |
| Cooling method | Air Cooling |
| Communication port | RS232/RS485
Standard Modbus |
| Analog control interface | DB15 |
| Output Interface | N/UHF |
| Chassis size | 440x406x130mm
Standard 3U |
| Panel size | 480x135mm |
| weight | 13kg |
