The system is a multi-source organic-inorganic thermal generation system with a single-chamber cylindrical structure, which is mainly used for the research of EL, OEL, metallic, organic films, as follows:
1. The system adopts a structure featuring single-chamber circular and front-open cover.
2. The sample stage can be applied with a mask.
3. Sample size: Maximum 100×100mm; (4X4”)
4. 2 channels quartz crystal oscillator probe are reserved in the growth chamber
5. The growth chamber is equipped with 2 organic beam source, 1 set of evaporation power supply equipped and temperature control can be carried out through the imported temp. controller.
6. The growth chamber vacuum obtaining system uses domestic turbo molecular pump (600L/S) + mechanical pump (9L/S) for pumping;
7. The vacuum chamber components and equipped parts are all made of high-quality stainless-steel material, adopting the technique of argon-arc welding, and the surface treatment is made through the most advanced electrochemical polishing passivation
process.
II. the main components and technical performance of the system
The ultimate vacuum of the growth chamber is ≤6×10-5 Pa; the pumping speed can reach 6×10-4 Pa in 40 minutes.
Part 1: Vacuum Chamber Cavity Components
Vacuum chamber cavity assembly size: round vertical vacuum chamber, its size is about Φ350×H380, front door is structure with aluminum cover, vacuum chamber adopts high vacuum design, wall anti-fouling board is made of high quality stainless-steel 304 material , argon-arc welding and surface treatment is finished through spray glass pill + chemical electropolishing passivation treatment new process.
The flange interface of various specifications is welded to the vacuum chamber assembly as follows:
1.1. The flange interface of the upper head of the vacuum chamber: 1 (connected to the sample assembly);
1.2. CF150 flange interface: 1 (molecular pump interface);
1.3. CF35 flange interface: 6 (connected to high vacuum ionization gauge, film thickness gauge, side pumping, baking lighting, etc.);
1.4. CF16 flange interface: 4 (intake line, inflation valve, 1 spare);
1.5. KF16 flange interface: 1 (connected to low vacuum resistance regulation);
1.6. KF40 flange interface: 1 (connected to the side of the pipeline);
1.7. The body has an RF200 with a glass baffle observation window.
1.8. Evaporation source baffle interface: 2 manual ones
1.9. A set of manual inorganic power selector switches
1.10. Two spare KF40 vacuum feedtghrough
Part 2 : Organic Evaporation Boat and Power Supply
2.1. 2 new evaporation sources (high and low temperature compatible source ), each steaming material can be loaded with 10CC, water cooling;
2.2. 1 set of beam source power supply 2400W; 0-8V, 0-300A
2.3. The beam source furnace temperature controller
2. 4. Temperature range is RT-600C
2.5. There is an electric heat shield on the upper part of the beam source furnace to prevent the evaporation boat from radiating upward;
2.6. An anti-temperature interference device is arranged between the beam source furnaces;
Part 3 : Sample mask device
The mask is replaced by manual replacement. (Customized according to customer’s request)
Part 4 : Sample station
4.1. Substrate size: 1 piece of 100×100mm substrate or less; adjustable evaporation distance between the source and the sample holder 250mm – 300mm
4.2. Rotationg speed； 0-30 RPM
4.3. Optional heating function from RT-500C
Part 5 : Vacuum background pumping and vacuum measurement set
5.1. Composite molecular pump: FF-600 molecular pump
5.2. Mechanical pump and solenoid valve: pumping speed 9L/S with oil mist trap
5.3. SS hose connected to molecular pump and mechanical pump
5.4. Composite digital display vacuum gauge and meter
Pirani gauge: (KF16 quick release flange) 1.0x103Pa —1.0×10-1Pa
Ionization gauge: (CF35 knife flange) 1.0×10-1Pa —1.0×10-5Pa
5.5. Bleed valve and inflation valve: 2 for vacuum chamber release and vacuum inflation 5.6. Other valves: KF40 side angle valve and DN40 electromagnetic shut-off valve
5.6 Viton O-rings on connections and clamps
Part 6 : Vacuum room lighting device
6.1. Illuminates the chamber from the side
Part 7 : Water Cooled Film Thickness Measurement System (QCM)
7.1. Two probes in the chamber connected from KF feedthrough
7.2. Shutter Mechanism
7.3. Water Cooled
7.4. 0-99999.9 Angstrom Measurement Capability
7.5. Measurement Precision 1.0A
Part 8 : Water Chiller
8.1. Cooling Capacity : 1.7KW
8.2. Refrigerant Type : R134A
8.3. Cooling can be set between 5oC-40oC
8.4. Tank Capacity : 12 L
8.5. Maximum Flow Rate : 10 L/min
Part 9 : Electrical Protection for Safety and Facility Requirements
Space Requirement : At least 75 sq. ft., height > 6 ft.
Power supply: 208 – 240V AC, single phase, maximum 10KW (50A circuit breaker) Suggested to use with connected to Uninterruptable Power Supply
System has its own circuit breaker and electricity protection unit, fuses, RCR etc.
In case of electricity cut off, the turbo molecular pump can save itself by controlling inflation valve immediately
