VTC-100A is CE certified compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4″. The spinning speed is variable from 500-8000 rpm with two programmable segments. The package comes included with complete accessories for immediate use. The latest versions have the vacuum chuck and liquid disk made of Polypropylene (PP).
| Specifications | |
|---|---|
| Structure | • Aluminum casting case to keep spinning stable • Liquid disk made of Polypropylene (PP) to resist most of corrosive solutions • Drainage outlet and vacuum pump connector are on back panel • One filter is included in standard package. It is used to connect the pump and coater for preventing waste water from flowing into the pump • One oil-less vacuum pump is included in the standard package, please click here for specification details. |
| Vacuum Chuck | • 3 sets of PP anti-corrosive vacuum chucks come in different sizes (1”, 2” and 4”) • 1 piece of adhesive tape (6” W x 24” L) is included for coating irregularly shaped substrates (e.g. Place the irregular substrate on the adhesive tape, then the vacuum chuck will hold the tape by suction) • Mini suction cups are available for small wafer with less 1″ dia. or substrate with regular ( 5×5, or 10x10mm)or irregular shape. Please click here to order. at extra cost. ( see picture below right )exhuast filter is included |
| Spin Speed | • Digital control panel with two programmable segments of different spin times (1~60s) and speeds • 500 – 8000 RPM adjustable spining speed |
| Liquid Injecting | • 20mL syringe is used to contain the coating material. (see the first picture below) • The syringe holder height can be adjusted and rotated freely along the support rod. • Optional: o You may choose Precision Electronic Single Channel Pipette: 20 – 200uL for more accurate coating o Using plasma-cleaner to treat substrate surface before coating can improve film quality |
| Input Power | 110VAC or 220VAC please select the voltage in option bar. |
| Motor Power | 150 W |
| Product Dimensions | 13”(L) x 10”(W) x 8.5”(H) |
| Net Weight | 15 kg (33 lbs) |
| Compliance | CE Certified |
| Warranty | • One year limited with lifetime support • Rusting and damage due to improper storage condition or maintenance is not covered by warranty |
| Shipping Dimensions | 40″(L) x 28″(W) x 24″(H) |
| Shipping Weight | 46 kg (100 lbs) |
